april24,2007--avizatechnology,inc.(nasdaq:avza),asupplierofadvancedsemiconductorcapitalequipmentandprocesstechnologiesfortheglobalsemiconductorindustryandrelatedmarkets,todayannouncedthatitreceivedamulti-system,multi-chamberorderforitscelsior(tm)single-wafer,atomiclayerdeposition(ald)systemfromaleadingfoundryintaiwan.thefoundry,anewaldcustomerforaviza,planstoutilize
thecelsior(tm)systemsforhigh-volumedramdeviceproductionatthe90-nmandbelowgeometries.thetoolswillhelpsupportthefoundry’stechnologyrequirementsandcapacitytargetsforits300-mmfab.
aviza’scelsioraldsystemcontinuestogainacceptanceatworldwidefabsintaiwan,china,europeandtheu.s.astheprocesstoolofrecordfor90-nmandbelowdramdevicemanufacturing,specificallyforadvancedtrenchcapacitorstructures.intaiwan,celsiorhasbeenselectedbymultiplecustomersforhighvolumeproductionattheirrespective300-mmmanufacturingsites.
"weareverypleasedtohavereceivedthismulti-systemorderfromthisfoundrycustomer,whichalsomarksanewaldcustomerwinforaviza,enablingthecompanytofurtherexpanditsglobalpresenceandincreaseitsaldmarketpenetration,"saidsubratachatterji,vicepresidentandgeneralmanager,aldbusinessunitofavizatechnology,inc."thisorderwasaresultofaviza’sabilitytodemonstrateitsexpertiseandexperiencewithhigh-volumealdproductiontoenableadvanceddramdevicemanufacturing."
aboutcelsior
theawardwinningcelsiorsystemfeaturesaninnovativechamber,whichoffersincreasedthroughput,lowchemicalconsumptionandextendedprocesswindow--resultinginlowcostofownership.celsior’spatentedshowerheadisdesignedtomeetthestringentaldprocessneeds,withthecapabilityofachievinglessthan1percentthicknessuniformityrequirementsacrossa300-mmwafer.thetoolleveragesasmallreactionchamberutilizingaviza’spatentpendingcomputermodeledgasflowdynamicstoreducethereactionvolumeandremoveemptyspaces,reducingtheareasavailablefordefectformationresultinginhigherdieyields.celsiorisbasedonareliable,fieldprovenplatformuti
lizedacrossallavizasinglewafersystems,includingpvd,cvdandetch.thisplatformincludesarobusttransferhubandhigh-efficiencycontrolsystem--translatingintohighersystemuptimeandavailability.celsiorisextendible,allowingtheseamlessadditionofprocesschambersforaddingfuturecapacityornewtechnology.
